articleTop 1% cited
Mechanisms and theory of physical sputtering by particle impact
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · Vol. 27(1) · pp. 1–20
Ion-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials ResearchSputteringEngineering physicsCascadeExcitationParticle (ecology)Field (mathematics)AlloyMaterials scienceNanotechnologyPhysics
Citations
291
FWCI
28.00
field-weighted impact
References
271
Percentile
100%
vs. same field & year
Citations per year
References
Tridyn — A TRIM simulation code including dynamic composition changes
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 638 citations
The depth resolution of sputter profiling
Applied Physics A · 1979 · 596 citations
Calculations of nuclear stopping, ranges, and straggling in the low-energy region
Physical review. B, Solid state · 1977 · 806 citations
Ion beam mixing: Basic experiments
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 313 citations
A mechanism of surface micro-roughening by ion bombardment
Journal of Materials Science · 1973 · 565 citations
Desorption induced by electronic transitions
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 418 citations
Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
Physical review. B, Solid state · 1974 · 1,585 citations
Sputtering studies with the Monte Carlo Program TRIM.SP
Applied Physics A · 1984 · 911 citations
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