articleTop 1% cited
The depth resolution of sputter profiling
Applied Physics A · 1979 · Vol. 18(2) · pp. 131–140
H. H. Andersen✉(Aarhus University)
Ion-surface interactions and analysisMetal and Thin Film MechanicsIntegrated Circuits and Semiconductor Failure AnalysisSputteringCascadeProjectileRecoilRadiationMixing (physics)Materials scienceProfiling (computer programming)Resolution (logic)Computational physics
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References
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Physical Review · 1969 · 3,499 citations
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