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Novel optical approach to atomic force microscopy

Applied Physics Letters · 1988 · Vol. 53(12) · pp. 1045–1047

Gerhard Meyer✉(IBM Research - Thomas J. Watson Research Center)Nabil M. Amer(IBM Research - Thomas J. Watson Research Center)

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Abstract

A sensitive and simple optical method for detecting the cantilever deflection in atomic force microscopy is described. The method was incorporated in an atomic force microscope, and imaging and force measurements, in ultrahigh vacuum, were successfully performed.

Force Microscopy Techniques and Applications Mechanical and Optical Resonators Near-Field Optical MicroscopyAtomic force microscopyCantileverMagnetic force microscopeAtomic force acoustic microscopyNon-contact atomic force microscopyConductive atomic force microscopyMicroscopyKelvin probe force microscopeMaterials scienceOptical microscope

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Using force modulation to image surface elasticities with the atomic force microscope