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Steven M. George

University of Colorado BoulderORCID https://orcid.org/0000-0003-0253-9184

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Top Publications

Atomic Layer Deposition: An Overview

Chemical Reviews20095,574 citationsFirst authorCorresponding

Low-Temperature Al<sub>2</sub>O<sub>3</sub> Atomic Layer Deposition

Chemistry of Materials20041,350 citations

Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

Thin Solid Films2002719 citationsCorresponding

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Review of Scientific Instruments2002554 citations

Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry

Thin Solid Films1997508 citations

Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Surface Science1995458 citationsCorresponding

Steven M. George · Scinovex