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Numerical study on the measurement of thin film mechanical properties by means of nanoindentation

Xi ChenJoost J. Vlassak
Metal and Thin Film MechanicsAdhesion, Friction, and Surface InteractionsDiamond and Carbon-based Materials ResearchNanoindentationMaterials scienceIndentationStiffnessThin filmSubstrate (aquarium)Composite materialFinite element methodIndentation hardnessNanotechnology
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331
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References
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An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26,236 citations
A method for interpreting the data from depth-sensing indentation instruments
Journal of materials research/Pratt's guide to venture capital sources · 1986 · 2,800 citations
Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments
Journal of materials research/Pratt's guide to venture capital sources · 1998 · 809 citations
A critical examination of the fundamental relations used in the analysis of nanoindentation data
Journal of materials research/Pratt's guide to venture capital sources · 1999 · 439 citations
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