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Synthesis of Large‐Area MoS<sub>2</sub> Atomic Layers with Chemical Vapor Deposition
Advanced Materials · 2012 · Vol. 24(17) · pp. 2320–2325
Yi‐Hsien Lee(Institute of Atomic and Molecular Sciences, Academia Sinica)Xinquan Zhang(Tunghai University)Wenjing Zhang(Institute of Atomic and Molecular Sciences, Academia Sinica)Mu‐Tung Chang(Institute of Physics, Academia Sinica)Cheng‐Te Lin(Institute of Atomic and Molecular Sciences, Academia Sinica)Kai‐Di Chang(Tunghai University)Ya-Chu Yu(Tunghai University)Jacob Tse‐Wei Wang(Institute of Atomic and Molecular Sciences, Academia Sinica)Chia‐Seng Chang(Institute of Physics, Academia Sinica)Lain‐Jong Li✉(Tunghai University)Tsung‐Wu Lin✉(Tunghai University)
Abstract
Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the synthesized MoS(2) sheets are highly crystalline.
2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applicationsChemical vapor depositionMaterials scienceMonolayerAtomic layer depositionDeposition (geology)Chemical engineeringNanotechnologyCombustion chemical vapor depositionLayer (electronics)Thin film
MeSH terms
DisulfidesGasesMolybdenumOxidesSilicon DioxideNanostructures
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Inorganic nanotubesThe illustration of John Dalton (reproduced courtesy of the Library and Information Centre, Royal Society of Chemistry) marks the 200th anniversary of his investigations which led to the determination of atomic weights for hydrogen, nitrogen, carbon, oxygen, phosphorus and sulfur.
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