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Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors

Applied Physics Letters · 2004 · Vol. 84(18) · pp. 3654–3656

Qing Wan✉(Institute of Physics)Q. H. Li(Institute of Physics)Yujin Chen(Institute of Physics)T. H. Wang(Institute of Physics)Xiaobo He(Institute of Electronics)J. P. Li(Chinese Academy of Sciences)Chuan Lin(Shanghai Institute of Microsystem and Information Technology)

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Abstract

Based on the achievement of synthesis of ZnO nanowires in mass production, ZnO nanowires gas sensors were fabricated with microelectromechanical system technology and ethanol-sensing characteristics were investigated. The sensor exhibited high sensitivity and fast response to ethanol gas at a work temperature of 300 °C. Our results demonstrate the potential application of ZnO nanowires for fabricating highly sensitive gas sensors.

Gas Sensing Nanomaterials and Sensors ZnO doping and properties Acoustic Wave Resonator TechnologiesNanowireMaterials scienceFabricationMicroelectromechanical systemsNanotechnologyEthanol fuelWide-bandgap semiconductorOptoelectronicsEthanolChemistry

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