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Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition

Thin Solid Films · 2003 · Vol. 445(2) · pp. 263–267
Hideaki AguraAkio SuzukiTatsuhiko MatsushitaTakanori AokiMasahiro Okuda
ZnO doping and propertiesElectronic and Structural Properties of OxidesGas Sensing Nanomaterials and SensorsMaterials sciencePulsed laser depositionElectrical resistivity and conductivitySubstrate (aquarium)Deposition (geology)DopingLaserTransmittanceAnalytical Chemistry (journal)Thin film
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References
Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
Japanese Journal of Applied Physics · 1985 · 546 citations
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